Vacuum pump(2)

Performance measures

  • Pumping speed refers to the volume flow rate of a pump at its inlet, often measured in volume per unit of time. Momentum transfer and entrapment pumps are more effective on some gases than others, so the pumping rate can be different for each of the gases being pumped, and the average volume flow rate of the pump will vary depending on the chemical composition of the gases remaining in the chamber.
  • Throughput refers to the pumping speed multiplied by the gas pressure at the inlet, and is measured in units of pressure·volume/unit time. At a constant temperature, throughput is proportional to the number of molecules being pumped per unit time, and therefore to the mass flow rate of the vacuum pump. When discussing a leak in the system or backstreaming through the vacuum  pump, throughput refers to the volume leak rate multiplied by the pressure at the vacuum side of the leak, so the leak throughput can be compared to the pump throughput.
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