Entrapment
Entrapment pumps may be cryopumps, which use cold temperatures to condense gases to a solid or adsorbed state, chemical pumps, which react with gases to produce a solid residue, or ionization pumps, which use strong electrical fields to ionize gases and propel the ions into a solid substrate. A cryomodule uses cryopumping.
- Ion pump
- Cryopump
- Sorption pump
- Non-evaporative getter
Other pump types
- Venturi vacuum pump (aspirator) (10 to 30 kPa)
- Steam ejector (vacuum depends on the number of stages, but can be very low)
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