In 1654, Otto von Guericke invented the first vacuum pump and conducted his famous Magdeburg hemispheres experiment, showing that teams of horses could not separate two hemispheres from which the air had been evacuated. Robert Boyle improved Guericke's design and conducted experiments on the properties of vacuum. Robert Hooke also helped Boyle produce an air pump which helped to produce the vacuum. The study of vacuum then lapsed until 1855, when Heinrich Geissler invented the mercury displacement pump and achieved a record vacuum of about 10 Pa (0.1 Torr). A number of electrical properties become observable at this vacuum level, and this renewed interest in vacuum. This, in turn, led to the development of the vacuum tube.
In the 19th century, Nikola Tesla designed the apparatus, imaged to the right, that contains a Sprengel Vacuum Pump to create a high degree of exhaustion.
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