1, the work of vacuum pressure vacuum equipment should meet the limit of vacuum and pressure requirements.
Such as: vacuum coating requirements of 1 × 10-5mmHg vacuum, the choice of vacuum pumps at least 5 × 10-6mmHg. The vacuum pump is usually higher than the degree of vacuum equipment to vacuum half an order of magnitude.
2, the right to choose the working point of the vacuum pump.
Each pump has a working pressure range, such as: the proliferation of pumps for the 10-3 ~ 10-7mmHg, in such a wide range of pressure, the pump with the pumping speed and pressure changes in pressure stability range of 5 × 10 -4 ~ 5 × 10-6mmHg. Thus, the pump operating point should be selected within this range, and can not be allowed under the 10-8mmHg in long-term work. Another example is titanium sublimation pumps can work under 10-2mmHg, but its working pressure should be less than 1 × 10-5mmHg for good.
3, vacuum pump under pressure in their work, should be able to drain away the process of vacuum equipment, process all the gas produced.