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4, the correct combination of vacuum pumps.

As a result of selective extraction vacuum pump, which sometimes can not choose a pump to meet the exhaust requirements, the need to combine several pump each other to meet the ventilation requirements. Such as titanium sublimation pump to a high hydrogen pumping speed, but it can not pump helium, and the tri-polar type sputter ion pump, (or non-symmetrical diode cathode sputtering ion pump) to a certain degree of argon pumping speed, the two combined so that a vacuum device will get a better vacuum. In addition, some pumps can not work under atmospheric pressure, the need for pre-vacuum; some vacuum pressure lower than atmospheric pressure exports, the need to pre-pump, one-time capital needs to combine the use of pumps.

5, vacuum equipment requirements for oil pollution.

If the stringent requirements of oil-free equipment, they should choose a variety of non-oil, such as: water ring pumps, molecular sieve adsorption pump, sputter ion pumps, cryogenic pumps. If not strictly, you can choose to have the pumps, plus a number of oil pollution prevention measures, such as additional cold trap, barrier boards, blocked oil wells, but also a vacuum requirements can be met.